Authors
Soojin Park, Dong Hyun Lee, Ji Xu, Bokyung Kim, Sung Woo Hong, Unyong Jeong, Ting Xu, Thomas P Russell
Publication date
2009/2/20
Journal
Science
Volume
323
Issue
5917
Pages
1030-1033
Publisher
American Association for the Advancement of Science
Description
Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self-assembly of block copolymer microdomains into oriented arrays with quasi–long-range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self-assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single-grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a …
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